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MEMS

March - June 2023

Context:

Wanted to take a unique course to learn something completely different than what I've learned before and outside of what I would have originally considered my field of interest. So I took an ECE/ME course on MEMS technology. 

Skills:

  • Cleanroom experience

  • Micro 2.5D design

  • Report Writing

Goal:

The aim of the course was to provide an introduction to basic MEMS concepts, fabrication methods, devices, and applications while gaining experience with working in an actual cleanroom. 
 

What I did:

  • Fabricated multiple MEMS devices

  • Wrote process followers and designed lithography masks for MEMS devices

  • Wrote 2 lab fabrication/study reports​

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Below you can see some of the images that are featured in the lab reports:​

What I learned:

  • Fabrication processes including proper wafer cleaning, thermal oxidation, photolithography, HF/KOH etching, and dry/wet releasing

  • Successful applications of MEMS technologies including inkjet and the common classroom projector

  • Innovative but unsuccessful devices such as a MEMS micro-engine and the claimed technology of Theranos

  • Chip characterization methods including using a Dektak and optical microscope

  • This is a really cool world that I will pay more attention to from now on

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